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Transmission electron microscopy of silicon VLSI circuits and structures /

Marcus, R. B.

Transmission electron microscopy of silicon VLSI circuits and structures / R.B. Marcus and T.T. Sheng. - New York : Wiley, c1983. - x, 217 p. : ill. ; 29 cm.

"A Wiley-Interscience publication."

Includes bibliographical references and index.

ISBN: 0471092517

LCCN: 83003469

Subjects--Topical Terms:
Integrated circuits.
Transmission electron microscopy.

Dewey Class. No.: 621.38173

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