Microsensors /
Microsensors /
Richard S. Muller ... [et al.].
- New York : IEEE Press, c1991.
- viii, 472 p. : ill. ; 29 cm.
"Prepared under the sponsorship of the IEEE Electron Devices Society."
Includes bibliographical references (p. 451-461) and indexes.
0879422459
90004745
Miniature electronic equipment--Design and construction.
Detectors--Design and construction.
Microelectronics.
TK7870 / .M4575 1991
681.2
"Prepared under the sponsorship of the IEEE Electron Devices Society."
Includes bibliographical references (p. 451-461) and indexes.
0879422459
90004745
Miniature electronic equipment--Design and construction.
Detectors--Design and construction.
Microelectronics.
TK7870 / .M4575 1991
681.2