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The science and engineering of microelectronic fabrication / Stephen A. Campbell.

By: Material type: TextTextSeries: The Oxford series in electrical and computer engineeringPublication details: New York : Oxford University Press, c2001 [reprinted 2004].Edition: 2nd edDescription: xiv, 603 p. : ill. ; 24 cmISBN:
  • 0195136055
Subject(s): DDC classification:
  • 621.38152 21
Online resources:
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Holdings
Item type Current library Call number Copy number Status Date due Barcode Item holds
Books Books Central Library, KUET General Stacks 621.38152 CAM (Browse shelf(Opens below)) 1 Available 3010034308
Books Books Central Library, KUET General Stacks 621.38152 CAM (Browse shelf(Opens below)) 2 Available 3010034309
Books Books Central Library, KUET General Stacks 621.38152 CAM (Browse shelf(Opens below)) 3 Available 3010034307
Books Books Central Library, KUET General Stacks 621.38152 CAM (Browse shelf(Opens below)) 4 Available 3010034310
Books Books Central Library, KUET General Stacks 621.38152 CAM (Browse shelf(Opens below)) 5 Available 3010034306
Total holds: 0

Includes bibliographical references and index.

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