TY  - BOOK
AU  - Quinten,Michael
TI  - A practical guide to optical metrology for thin films
SN  - 9783527664344
AV  - QC176.84.O7 Q56 2012
U1  - 530.4/275 23
PY  - 2012///
CY  - Weinheim, Chichester
PB  - Wiley-VCH, John Wiley [distributor]
KW  - Thin films
KW  - Optical properties
KW  - SCIENCE
KW  - Energy
KW  - bisacsh
KW  - Mechanics
KW  - General
KW  - Physics
KW  - fast
KW  - Electronic books
N1  - Includes bibliographical references and index; Cover; Related Titles; Title Page; Copyright; Dedication; Preface; Chapter 1: Introduction; Chapter 2: Propagation of Light and Other Electromagnetic Waves; 2.1 Properties of Electromagnetic Waves; 2.2 Huygens-Fresnel Principle; 2.3 Interference of Electromagnetic Waves; 2.4 Reflection and Refraction; 2.5 Diffraction; 2.6 Scattering; 2.7 Dielectric Function and Refractive Index; Chapter 3: Spectral Reflectance and Transmittance of a Layer Stack; 3.1 Reflectance and Transmittance of a Single Layer; 3.2 Propagating Wave Model for a Layer Stack; Chapter 4: The Optical Measurement; 7.7 Measurement of Critical DimensionsNumerics with Complex Numbers; A.1 Addition; A.2 Multiplication; A.3 Modulus; A.4 Division; A.5 Power n; A.6 Logarithm; A.7 Exponentiation; A.8 Trigonometric Functions; Fourier Transform; B.1 Linearity; B.2 Scaling; B.3 Shifting; B.4 Damping; B.5 Convolution; B.6 Plancherel Theorem and Parseval's Theorem; Levenberg-Marquardt Algorithm; Downhill Simplex Algorithm; References; Index
N2  - A one-stop, concise guide on determining and measuring thin film thickness by optical methods. This practical book covers the laws of electromagnetic radiation and interaction of light with matter, as well as the theory and practice of thickness measurement, and modern applications. In so doing, it shows the capabilities and opportunities of optical thickness determination and discusses the strengths and weaknesses of measurement devices along with their evaluation methods. Following an introduction to the topic, Chapter 2 presents the basics of the propagation of light and other electromag
UR  - http://onlinelibrary.wiley.com/book/10.1002/9783527664344
ER  -