TY  - BOOK
AU  - Kääriäinen,Tommi
AU  - Cameron,David
AU  - Kääriäinen,Marja-Leena
AU  - Sherman,Arthur
TI  - Atomic layer deposition: principles, characteristics, and nanotechnology applications 
SN  - 9781118747384
AV  - TS695 
U1  - 620/.5 23
PY  - 2013///]
CY  - Salem, Massachusetts, Hoboken, New Jersey
PB  - Scrivener Publishing, LLC, Wiley
KW  - Chemical vapor deposition
KW  - Epitaxy
KW  - Microelectronics
KW  - Nanotechnology
KW  - SCIENCE
KW  - Nanoscience
KW  - bisacsh
KW  - TECHNOLOGY & ENGINEERING
KW  - Nanotechnology & MEMS
KW  - fast
KW  - Nanotechnologie
KW  - gnd
KW  - Atomlagenabscheidung
KW  - Mikroelektromekaniska system
KW  - sao
KW  - Electronic books
KW  - local
N1  - Includes bibliographical references and index
UR  - http://onlinelibrary.wiley.com/book/10.1002/9781118747407
ER  -