TY  - BOOK
AU  - Harding,Kevin G.
TI  - Handbook of optical dimensional metrology
T2  - Series in optics and optoelectronics
SN  - 9781439854822 (ebook : PDF)
PY  - 2013///
CY  - Boca Raton
PB  - CRC Press
KW  - Measurement
KW  - Handbooks, manuals, etc
KW  - Optical measurements
KW  - Dimensional analysis
KW  - Electronic books
KW  - lcsh
N1  - "A Taylor & Francis book."; Includes bibliographical references and index; pt. 1. Optical metrology : introduction -- pt. 2. Optical metrology of larger objects -- pt. 3. Optical metrology of medium size objects -- pt. 4. Optical micro-metrology of small objects -- pt. 5. Advanced optical micro-metrology methods; Also available in print edition
N2  - "The need for faster and more accurate dimensional measurements has sparked the development of a range of laser types and methods with greater computational power. Featuring contributors from industry and academia, this handbook reviews modern optical dimensional measurement technologies and their applications. Covering scales ranging from nanometers to kilometers, it presents the principles, techniques, and devices used in modern optical dimensional metrology. An essential desk reference for metrologists and engineers, the book incorporates data tables and a multitude of available techniques"--
UR  - http://marc.crcnetbase.com/isbn/9781439854822
ER  -