TY  - BOOK
AU  - Marcus,R.B.
AU  - Sheng,T.T.
TI  - Transmission electron microscopy of silicon VLSI circuits and structures
SN  - 0471092517
U1  - 621.38173 19
PY  - 1983///
CY  - New York
PB  - Wiley
KW  - Integrated circuits
KW  - Transmission electron microscopy
N1  - "A Wiley-Interscience publication."; Includes bibliographical references and index
ER  -