TY  - BOOK
AU  - May,Gary S.
AU  - Sze,S.M.
TI  - Fundamentals of semiconductor fabrication
SN  - 981253072X
U1  - 621.38152 22
PY  - 2004///
CY  - New York
PB  - Wiley
KW  - Semiconductors
KW  - Design and construction
KW  - Integrated circuits
N1  - Includes bibliographical references and index
UR  - http://www.loc.gov/catdir/bios/wiley044/2003276248.html
UR  - http://www.loc.gov/catdir/description/wiley037/2003276248.html
UR  - http://www.loc.gov/catdir/toc/wiley032/2003276248.html
ER  -