TY - BOOK AU - Gupta,D.C. AU - Langer,Paul H. ED - ASTM Committee F-1 on Electronics. TI - Emerging semiconductor technology: a symposium SN - 0803104596 U1 - 621.38152 19 PY - 1987/// CY - Philadelphia, PA PB - American Society for Testing and Materials KW - Semiconductor industry KW - Congresses KW - Semiconductors KW - Design and construction N1 - Papers presented at the Fourth International Symposium on Semiconductor Processing; "ASTM publication code number (PCN) 04-960000-46."; Includes bibliographies and indexes ER -