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	1.	Atomic layer deposition : principles, characteristics, and nanotechnology applications / Tommi Kääriäinen, David Cameron, Marja-Leena Kääriäinen, and Arthur Sherman. by Kääriäinen, Tommi Cameron, David, 1949- Kääriäinen, Marja-Leena Sherman, Arthur, 1931- Edition: 2nd edition. Material type: Text; Format: available online ; Literary form: Not fiction Publisher: Salem, Massachusetts : Hoboken, New Jersey : Scrivener Publishing, LLC ; Wiley, [2013] Online access: Wiley Online Library Availability: No items available. Add to cart (remove)
	2.	Heteroepitaxy of semiconductors [electronic resource] : theory, growth, and characterization / John E. Ayers. by Ayers, John E Material type: Text; Format: electronic available online ; Literary form: Not fiction Publication details: Boca Raton : CRC Press, c2007 Online access: Distributed by publisher. Purchase or institutional license may be required for access. Availability: No items available. Add to cart (remove)

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