Emerging semiconductor technology : a symposium / sponsored by ASTM Committee F-1 on Electronics, San Jose, CA, 28-31 Jan. 1986 ; Dinesh C. Gupta and Paul H. Langer, editors.
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TextPublication details: Philadelphia, PA : American Society for Testing and Materials, c1987.Description: 704 p. : ill. ; 24 cmISBN: - 0803104596
- 621.38152 19
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Papers presented at the Fourth International Symposium on Semiconductor Processing.
"ASTM publication code number (PCN) 04-960000-46."
Includes bibliographies and indexes.
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