000 04095cam a2200685Ka 4500
001 ocn773300979
003 OCoLC
005 20171224113811.0
006 m o d
007 cr cn|||||||||
008 120119s2011 gw ob 001 0 eng d
040 _aDG1
_beng
_epn
_cDG1
_dYDXCP
_dOCLCO
_dOCLCQ
_dOCLCF
_dOCLCA
_dEBLCP
_dMEU
_dN$T
_dDEBSZ
_dE7B
_dIDEBK
_dOCLCQ
_dCOO
_dOCLCQ
019 _a849922525
_a908041352
020 _a9783527639915
_q(electronic bk.)
020 _a3527639918
_q(electronic bk.)
020 _a9783527639939
020 _a3527639934
020 _a9783527639922
020 _a3527639926
020 _z9783527327973
029 1 _aAU@
_b000049641677
029 1 _aDEBSZ
_b431658609
029 1 _aGBVCP
_b790035332
029 1 _aNZ1
_b14214512
029 1 _aNZ1
_b15340704
035 _a(OCoLC)773300979
_z(OCoLC)849922525
_z(OCoLC)908041352
037 _a10.1002/9783527639915
_bWiley InterScience
_nhttp://www3.interscience.wiley.com
050 4 _aTS695
_b.A86 2011
072 7 _aTEC
_x009070
_2bisacsh
082 0 4 _a621.38152
_222
049 _aMAIN
245 0 0 _aAtomic layer deposition of nanostructured materials /
_cedited by Nicola Pinna, Mato Knez.
260 _aWeinheim :
_bWiley-VCH ;
_aChichester :
_bJohn Wiley [distributor],
_c2011.
300 _a1 online resource (1 volume)
336 _atext
_btxt
_2rdacontent
337 _acomputer
_bc
_2rdamedia
338 _aonline resource
_bcr
_2rdacarrier
505 0 _aFront Matter -- Introduction to ALD. Theoretical Modeling of ALD Processes / Charles B Musgrave -- Step Coverage in ALD / Sovan Kumar Panda, Hyunjung Shin -- Precursors for ALD Processes / Matti Putkonen -- Sol₆Gel Chemistry and Atomic Layer Deposition / Guylhaine Clavel, Catherine Marichy, Nicola Pinna -- Molecular Layer Deposition of Hybrid Organic₆Inorganic Films / Steven M George, Byunghoon Yoon, Robert A Hall, Aziz I Abdulagatov, Zachary M Gibbs, Younghee Lee, Dragos Seghete, Byoung H Lee -- Low-Temperature Atomic Layer Deposition / Jens Meyer, Thomas Riedl -- Plasma Atomic Layer Deposition / Erwin Kessels, Harald Profijt, Stephen Potts, Richard van de Sanden -- Nanostructures by ALD. Atomic Layer Deposition for Microelectronic Applications / Cheol Seong Hwang -- Nanopatterning by Area-Selective Atomic Layer Deposition / Han-Bo-Ram Lee, Stacey F Bent -- Coatings on High Aspect Ratio Structures / Jeffrey W Elam -- Coatings of Nanoparticles and Nanowires / Hong Jin Fan, Kornelius Nielsch -- Atomic Layer Deposition on Soft Materials / Gregory N Parsons -- Application of ALD to Biomaterials and Biocompatible Coatings / Mato Knez -- Coating of Carbon Nanotubes / Catherine Marichy, Andrea Pucci, Marc-Georg Willinger, Nicola Pinna -- Inverse Opal Photonics / Davy P Gaillot, Christopher J Summers -- Nanolaminates / Adriana V Szeghalmi, Mato Knez -- Challenges in Atomic Layer Deposition / Markku Leskel̃ -- Index.
588 0 _aPrint version record.
504 _aIncludes bibliographical references and index.
650 0 _aChemical vapor deposition.
650 0 _aNanostructured materials.
650 7 _aTECHNOLOGY & ENGINEERING
_xMechanical.
_2bisacsh
650 7 _aChemical vapor deposition.
_2fast
_0(OCoLC)fst00853229
650 7 _aNanostructured materials.
_2fast
_0(OCoLC)fst01032630
655 4 _aElectronic books.
700 1 _aPinna, Nicola.
700 1 _aKnez, Mato.
710 2 _aWiley InterScience (Online service)
776 0 8 _iPrint version:
_tAtomic layer deposition of nanostructured materials.
_dWeinheim : Wiley-VCH ; Chichester : John Wiley [distributor], 2011
_z9783527327973
_w(OCoLC)751804738
856 4 0 _uhttp://onlinelibrary.wiley.com/book/10.1002/9783527639915
_zWiley Online Library
938 _aEBL - Ebook Library
_bEBLB
_nEBL1658413
938 _aebrary
_bEBRY
_nebr11041080
938 _aEBSCOhost
_bEBSC
_n972577
938 _aIngram Digital eBook Collection
_bIDEB
_ncis23048274
938 _aYBP Library Services
_bYANK
_n12362386
938 _aYBP Library Services
_bYANK
_n11833516
938 _aYBP Library Services
_bYANK
_n7484182
994 _a92
_bDG1
999 _c11514
_d11514