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| 001 | ocn816311244 | ||
| 003 | OCoLC | ||
| 005 | 20171224114110.0 | ||
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| 008 | 120622s2012 gw a ob 001 0 eng | ||
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_aQC176.84.O7 _bQ56 2012 |
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_a530.4/275 _223 |
| 049 | _aMAIN | ||
| 100 | 1 | _aQuinten, Michael. | |
| 245 | 1 | 2 |
_aA practical guide to optical metrology for thin films / _cMichael Quinten. |
| 260 |
_aWeinheim : _bWiley-VCH ; _aChichester : _bJohn Wiley [distributor], _c2012. |
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| 300 |
_a1 online resource : _billustrations |
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| 336 |
_atext _btxt _2rdacontent |
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| 337 |
_acomputer _bc _2rdamedia |
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| 338 |
_aonline resource _bcr _2rdacarrier |
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| 504 | _aIncludes bibliographical references and index. | ||
| 588 | 0 | _aPrint version record. | |
| 520 | _aA one-stop, concise guide on determining and measuring thin film thickness by optical methods. This practical book covers the laws of electromagnetic radiation and interaction of light with matter, as well as the theory and practice of thickness measurement, and modern applications. In so doing, it shows the capabilities and opportunities of optical thickness determination and discusses the strengths and weaknesses of measurement devices along with their evaluation methods. Following an introduction to the topic, Chapter 2 presents the basics of the propagation of light and other electromag. | ||
| 505 | 0 | _aCover; Related Titles; Title Page; Copyright; Dedication; Preface; Chapter 1: Introduction; Chapter 2: Propagation of Light and Other Electromagnetic Waves; 2.1 Properties of Electromagnetic Waves; 2.2 Huygens-Fresnel Principle; 2.3 Interference of Electromagnetic Waves; 2.4 Reflection and Refraction; 2.5 Diffraction; 2.6 Scattering; 2.7 Dielectric Function and Refractive Index; Chapter 3: Spectral Reflectance and Transmittance of a Layer Stack; 3.1 Reflectance and Transmittance of a Single Layer; 3.2 Propagating Wave Model for a Layer Stack; Chapter 4: The Optical Measurement. | |
| 505 | 8 | _a7.7 Measurement of Critical DimensionsNumerics with Complex Numbers; A.1 Addition; A.2 Multiplication; A.3 Modulus; A.4 Division; A.5 Power n; A.6 Logarithm; A.7 Exponentiation; A.8 Trigonometric Functions; Fourier Transform; B.1 Linearity; B.2 Scaling; B.3 Shifting; B.4 Damping; B.5 Convolution; B.6 Plancherel Theorem and Parseval's Theorem; Levenberg-Marquardt Algorithm; Downhill Simplex Algorithm; References; Index. | |
| 650 | 0 |
_aThin films _xOptical properties. |
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| 650 | 7 |
_aSCIENCE _xEnergy. _2bisacsh |
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| 650 | 7 |
_aSCIENCE _xMechanics _xGeneral. _2bisacsh |
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| 650 | 7 |
_aSCIENCE _xPhysics _xGeneral. _2bisacsh |
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| 650 | 7 |
_aThin films _xOptical properties. _2fast _0(OCoLC)fst01150034 |
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| 655 | 4 | _aElectronic books. | |
| 776 | 0 | 8 |
_iPrint version: _aQuinten, Michael. _tPractical guide to optical metrology for thin films. _dWeinheim : Wiley-VCH ; Chichester : John Wiley [distributor], 2012 _z9783527411672 _w(OCoLC)815367813 |
| 856 | 4 | 0 |
_uhttp://onlinelibrary.wiley.com/book/10.1002/9783527664344 _zWiley Online Library |
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