000 02248cam a2200373Ia 4500
001 TAF0KE12534PDF
003 FlBoTFG
005 20171224123731.0
006 m|||||o||d||||||||
007 cr||||
008 130419s2013 fluad sbf 001 0 eng d
020 _a9781439854822 (ebook : PDF)
040 _aFlBoTFG
_cFlBoTFG
090 _aT50
_b.H268 2013
092 _a530.8
_bH236
245 0 0 _aHandbook of optical dimensional metrology
_h[electronic resource] /
_cedited by Kevin Harding.
260 _aBoca Raton :
_bCRC Press,
_c2013.
300 _axiii, 492 p. :
_bill.
490 1 _aSeries in optics and optoelectronics
500 _a"A Taylor & Francis book."
504 _aIncludes bibliographical references and index.
505 0 _apt. 1. Optical metrology : introduction -- pt. 2. Optical metrology of larger objects -- pt. 3. Optical metrology of medium size objects -- pt. 4. Optical micro-metrology of small objects -- pt. 5. Advanced optical micro-metrology methods.
520 _a"The need for faster and more accurate dimensional measurements has sparked the development of a range of laser types and methods with greater computational power. Featuring contributors from industry and academia, this handbook reviews modern optical dimensional measurement technologies and their applications. Covering scales ranging from nanometers to kilometers, it presents the principles, techniques, and devices used in modern optical dimensional metrology. An essential desk reference for metrologists and engineers, the book incorporates data tables and a multitude of available techniques"--
_cProvided by publisher.
530 _aAlso available in print edition.
538 _aMode of access: World Wide Web.
650 0 _aMeasurement
_vHandbooks, manuals, etc.
650 0 _aOptical measurements
_vHandbooks, manuals, etc.
650 0 _aDimensional analysis
_vHandbooks, manuals, etc.
655 7 _aElectronic books.
_2lcsh
700 1 _aHarding, Kevin G.
776 1 _z9781439854815 (hardback)
830 0 _aSeries in optics and optoelectronics (CRC Press)
856 4 0 _uhttp://marc.crcnetbase.com/isbn/9781439854822
_qapplication/PDF
_zDistributed by publisher. Purchase or institutional license may be required for access.
999 _c15639
_d15639